ASML's Bas Dielessen highlights the critical role of chip reliability at Holland Innovative event
From cutting-edge EUV systems to advanced reliability methods, ASML's relentless pursuit of perfection ensures seamless performance and innovation in semiconductor manufacturing.
Published on January 1, 1970
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In his talk at the Reliability event recently hosted by Holland Innovative in Eindhoven, ASML’s Bas Dielessen shed light on the indispensable role of chips in modern technology. He showed how ASML's groundbreaking systems are pushing the boundaries of semiconductor manufacturing. With over 42,000 employees worldwide and operations in 16 cities, ASML has evolved from an obscure company to a global leader in the tech industry, driven by its relentless commitment to innovation and reliability.
The importance of chips
"First of all, I cannot think of a world without chips anymore," Dielessen began, emphasizing the ubiquity of chips in various technological applications. From artificial intelligence (AI) to energy transition and healthcare, chips are integral to solving some of the world's most pressing challenges. The high demand for advanced computing capabilities underscores the critical need for reliable and efficient semiconductor technology.
Dielessen highlighted ASML's remarkable growth. Its cutting-edge systems, particularly their Extreme Ultraviolet (EUV) lithography technology, have revolutionized the semiconductor industry. "Every big chip maker uses ASML systems," he said, underscoring the company's market dominance and the widespread adoption of its technology.
Complexity and reliability of ASML's systems
ASML's systems are renowned for their complexity and precision. For instance, developing the latest EUV systems took over 20 years of meticulous business development. These systems utilize tiny tin particles and a powerful CO2 laser to generate EUV light, which is crucial for creating the fine patterns required in modern chips. Given the high stakes, the reliability of these systems is paramount. Dielessen explained that any failure, even of a single component among the system's 100,000 parts, can lead to significant downtime and financial losses.
Minimizing downtime
To maintain the reliability of its systems, ASML employs a robust reliability department with around 200 engineers. This team is involved in every design process stage, ensuring reliability is built into each component and system. Dielessen introduced a comprehensive approach that integrates reliability considerations into the entire lifecycle of ASML's products.
A critical tool in ASML's reliability arsenal is the Reliability Database (RDB), which monitors the performance of parts and systems over time. This database has evolved from a simple list of numbers to an interactive dashboard accessible to all ASML engineers. The dashboard provides detailed insights into part performance, helping engineers quickly identify and address reliability issues.
Innovative tools
Dielessen showcased several advanced tools used by ASML to analyze and improve system reliability. The "Lifeline Plus" plot, for example, visually represents system performance over time, highlighting failure patterns and guiding engineers in their root cause analysis. Control charts further enhance ASML's ability to monitor part performance and identify trends that could indicate emerging reliability issues.
Balancing reliability and cost
In addition to technical analysis, ASML also considers the economic impact of reliability improvements. By combining data on part usage rates, costs, and CO2 impact, ASML prioritizes efforts to address the most critical issues. This holistic approach ensures that resources are allocated efficiently, maximizing the reliability of ASML's systems while minimizing the total cost of ownership for customers.